Electric resistance heating devices – Heating devices – Radiant heater
Patent
1993-12-16
1995-08-22
Jeffery, John A.
Electric resistance heating devices
Heating devices
Radiant heater
392418, 118724, 374126, H05B 362, H01L 2100
Patent
active
054448158
ABSTRACT:
A multi-zone lamp interference correction system and method for accurate pyrometry-based multi-point wafer temperature measurement in a multi-zone rapid thermal processing system comprises a plurality of lamps arranged in zones. A dummy lamp is also provided for each zone. Each lamp heating zone and its associated dummy lamp are connected to a controllable power supply. The radiance from a particular zone in the wafer combined with the lamp interference associated with the zone is measured using a first plurality of sensors. The lamp radiation from the plurality of dummy lamps are monitored using a second plurality of sensors. For each zone, a lamp interference component is removed from the wafer temperature sensor signal. The lamp interference components are based on geometry factors and the lamp radiance signals.
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Lee Yong J.
Moslehi Mehrdad M.
Donaldson Richard L.
Garner Jacqueline J.
Hiller William E.
Jeffery John A.
Texas Instruments Incorporated
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