Multi-wavelength programmable laser processing mechanisms and ap

Details Multi-wavelength programmable laser processing mechanisms and ap Multi-wavelength programmable laser processing mechanisms and ap

1995-06-06

1997-05-06

Walberg, Teresa J.

Electric heating

Metal heating

By arc

21912174, 21912175, 2191218, 21912183, B23K 2604

Patent

active

056267789

ABSTRACT:
A desired design for electronic structures is converted into a graphic design format and sorted into a pseudo-raster format corresponding to scan lines. A laser or other machining beam is controlled by a separate tracking beam utilizing a mid-objective scanning system. The firing frequency of the machining beam is determined by the position of the tracking beam on a detector, as compared to the scan line data. Accuracy is verified by detection of plume or spectra generated during machining. Alignment of the machining and tracking beams is by interferometric methods. The system improves optical performance parameters of telecentricity, angle of scanned beam line, location of line in which the scanned line resides, astigmatism and field curvature.

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