Multi-tunable microelectromechanical system (MEMS) resonators

Details Multi-tunable microelectromechanical system (MEMS) resonators Multi-tunable microelectromechanical system (MEMS) resonators

2006-08-22

2006-08-22

Tokar, Michael (Department: 2819)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S187000, C333S189000, C333S193000

Reexamination Certificate

active

07095295

ABSTRACT:
A method for tuning a vibratory device including a cantilevered resonator comprising the steps of increasing a voltage V0supplied to the vibratory device to thereby increase the bandwidth of the vibratory device; and keeping the resonant frequency of the vibratory device at substantially that natural frequency of the cantilevered resonator, wherein the vibratory device comprises: a capacitor including a movable plate and a fixed plate spaced from each other, the movable plate being part of the cantilevered resonator; a voltage source connected to the capacitor for providing voltage V0across the capacitor to produce an attractive force between movable plate and fixed plate; a circuit connecting the voltage source to the capacitor; and a load resistor in said circuit having a resistance RLsatisfying the following equation:μ=ω0⁢c0⁢RL(1-λ)where: μ is at least 10; ω0is the beam constant for the cantilevered resonator; c0is the capacitance for the capacitor; and λ is the voltage dependent coupling parameter for voltage V0.

REFERENCES:
patent: 4502029 (1985-02-01), Reed
patent: 4568895 (1986-02-01), Reed
patent: 5162691 (1992-11-01), Mariani et al.
patent: 5491604 (1996-02-01), Nguyen et al.
patent: 5640133 (1997-06-01), MacDonald et al.
patent: 5729075 (1998-03-01), Strain
patent: 5867074 (1999-02-01), Ogiso et al.
patent: 5955932 (1999-09-01), Nguyen et al.
patent: 6223601 (2001-05-01), Harada et al.
patent: 6236281 (2001-05-01), Nguyen et al.
patent: 6278337 (2001-08-01), Chan et al.
patent: 6404304 (2002-06-01), Kwon et al.
patent: 6624726 (2003-09-01), Niu et al.
patent: 6680660 (2004-01-01), Nguyen
patent: 6700460 (2004-03-01), Takamine
patent: 6707351 (2004-03-01), Gorrell
patent: 6710680 (2004-03-01), Niu et al.
patent: 6713938 (2004-03-01), Nguyen

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