Multi-track integrated spiral inductor

Inductor devices – Coil or coil turn supports or spacers – Printed circuit-type coil

Reexamination Certificate

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C257S531000

Reexamination Certificate

active

06885275

ABSTRACT:
An integrated circuit inductor includes a spiral pattern disposed upon a substrate. The track of the spiral is divided into multiple tracks to form a multi-track inductor. The individual tracks are disposed side by side and in different layers. Tracks that are aligned vertically are coupled by feed throughs, or vias. Multiple vias are used along the length of each of the multiple tracks. Tracks disposed in the same layer are joined together at their beginning, and at their termination. A patterned shield is fabricated from conductive fingers of n+ salicided material that is separated by non conducting polysilicon that fills the gaps between the fingers. The conductive fingers are coupled together in groups, which are in turn tied to a single point ground. In tying the groups together, a gap in the conducting path is provided to prevent ground loop currents. The shield is disposed between the multi-track inductor and the substrate.

REFERENCES:
patent: 4614925 (1986-09-01), Kane
patent: 4789976 (1988-12-01), Fujishima
patent: 4818903 (1989-04-01), Kawano
patent: 4903329 (1990-02-01), Marik et al.
patent: 4908328 (1990-03-01), Hu et al.
patent: 5031233 (1991-07-01), Ragan
patent: 5197170 (1993-03-01), Senda et al.
patent: 5239283 (1993-08-01), Wiesgickl
patent: 5329143 (1994-07-01), Chan et al.
patent: 5428829 (1995-06-01), Osburn et al.
patent: 5446311 (1995-08-01), Ewen et al.
patent: 5483207 (1996-01-01), Gabara
patent: 5492856 (1996-02-01), Ikeda et al.
patent: 5610433 (1997-03-01), Merrill et al.
patent: 5715012 (1998-02-01), Patel et al.
patent: 5717243 (1998-02-01), Lowther
patent: 5737035 (1998-04-01), Rotzoll
patent: 5739587 (1998-04-01), Sato
patent: 5777539 (1998-07-01), Folker et al.
patent: 5825600 (1998-10-01), Watt
patent: 5828589 (1998-10-01), Degenhardt
patent: 5852866 (1998-12-01), Kuettner et al.
patent: 5861647 (1999-01-01), Zhao et al.
patent: 5914630 (1999-06-01), Peterson
patent: 5966063 (1999-10-01), Sato et al.
patent: 6008713 (1999-12-01), Nasserbakht
patent: 6049258 (2000-04-01), Fawal et al.
patent: 3723778 (1988-01-01), None
patent: 19506324 (1995-10-01), None
patent: 0393717 (1990-10-01), None
patent: 0 431 887 (1991-06-01), None
patent: 0535536 (1993-04-01), None
patent: 0 629 040 (1994-12-01), None
patent: 0 780 853 (1997-06-01), None
patent: 2120478 (1983-11-01), None
patent: 62154607 (1987-07-01), None
patent: WO 9709786 (1997-03-01), None
patent: WO 9850956 (1998-11-01), None
European Search Report on European Patent Application No. EP 04 00 2810, (no date).
Burghartz et al., “Spiral Inductors and Transmission Lines in Silicon Technology Using Copper-Damascene Interconnects and Low-Loss Substrates,” IEEE Transactions on Microwave Theory and Techniques, vol. 45, No. 10, Oct., 1997, pp. 1961-1968 (XP000704848).
Lutz et al., “Modeling of Spiral Inductors on Lossy Substrates for RFIC Applications,” 1998 IEEE MTT-S Digest, pp. 1855-1858 (THIF-67), (no month).
Burghartz et al., “High-Q Inductors in Standard Silicon Interconnect Technology and its Application to an Integrated RF Power Amplifier,” IBM T.J. Watson Research Center, Yorktown Heights, New Jersey, 3 pp., (no date).
Craninckx et al., “A 1.8-GHz Low-Phase-Noise CMOS VCO Using Optimized Hollow Spiral Inductors,”IEEE Journal of Solid-State Circuits, vol. 32, No. 5, May 1997, pp. 736-744.
Long et al, “The Modeling, Characterization, and Design of Monolithic Inductors for Silicon RF IC's,”IEEE Journal of Solid-State Circuits, vol. 32, No. 3, Mar. 1997, pp. 357-369.
Yue et al., “On-Chip Spiral Inductors with Patterned Ground Shields for Si-Based RF IC's,”IEEE Journal of Solid-State Circuits, vol. 33, No. 5, May 1998, pp. 743-751.
Poole et al., “A CMOS Subscriber Line Audio Processing Circuit Including Adaptive Balance,” IEEE Proceedings of the International Symposium on Circuits and Systems, US, New York, vol. Conf. 21, 1988, pp. 1931-1934, (no month).
Nguyen, N. and Meyer, R., “Si IC-Compatible Inductors and LC Passive Filters,” IEEE Journal of Solid-State Circuits, US, New York, No. 4, Aug. 25, 1990, pp. 1028-1031.
Poole, S., Surace, G., Singh, B., Dyer, N., “A CMOS Subscriber Line Audio Processing Circuit Including Adaptive Balance,” IEEE International Symposium on Circuits and Systems, Finland, Espoo, vol. 2 of 3, Jun. 7-9, 1988, pp. 1931-1934, (no month).

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