Multi-tilt micromirror systems with concealed hinge structures

Details Multi-tilt micromirror systems with concealed hinge structures Multi-tilt micromirror systems with concealed hinge structures

2005-05-31

2005-05-31

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S391000, C359S290000

Reexamination Certificate

active

06900922

ABSTRACT:
Multi-tilt mirrors, assemblies and applications of the same, and methods of making. Micromirror devices employing a superstructure that includes a mirror supported over a hinge set above substructure. Various features described are applicable to improve manufacturability, enable further miniaturization of the elements and/or to increase relative light return. Devices can be produced utilizing the various optional features described herein to provide miniaturized, highly controllable optics solutions.

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