Multi-thermal zone shielding apparatus

Details Multi-thermal zone shielding apparatus Multi-thermal zone shielding apparatus

2005-01-18

2005-01-18

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S405000, C219S411000, C118S724000, C118S725000, C118S729000, C392S416000, C392S418000

Reexamination Certificate

active

06844527

ABSTRACT:
A multi-thermal zone shielding apparatus provides a multi-zone temperature profile for the shield while shielding a portion of a hot workpiece in a high temperature processing system. The apparatus keeps the workpiece temperature hot at the shielded area and maintains the rest of the shield at a lower temperature. The apparatus includes a multi-thermal zone shield having a low thermal transmissivity section for preventing heat loss from the shielded portion of the hot workpiece due to less thermal energy being transmitted through the shielding portion of the shield, thus maintaining a more uniform temperature at the shielded portion of the workpiece, and a high thermal transmissivity section in the rest of shield for allowing more thermal energy from the hot workpiece to be transmitted through the shield without heating the shield, thus maintaining a lower temperature at the portion of the shield that is not engaged with the workpiece. The apparatus can further include a non-reactive gas inlet for creating a pressurized cavity in the vicinity of the shielded portion of the workpiece.

REFERENCES:
patent: 4932358 (1990-06-01), Studley et al.
patent: 5304248 (1994-04-01), Cheng et al.
patent: 5965047 (1999-10-01), Blersch et al.
patent: 5991508 (1999-11-01), Ohmine et al.
patent: 6036782 (2000-03-01), Tanaka et al.
patent: 6069135 (2000-05-01), Falk et al.
patent: 6096135 (2000-08-01), Guo et al.

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