Measuring and testing – Instrument proving or calibrating
Reexamination Certificate
2006-03-01
2008-12-09
Noland, Thomas P (Department: 2856)
Measuring and testing
Instrument proving or calibrating
C073S001380, C702S116000, C374S002000
Reexamination Certificate
active
07461535
ABSTRACT:
A system and method for testing and calibrating integrated sensor devices that improves the manufacturing test throughput of the devices. The system includes a tester, a temperature controller, and at least one probe station including a thermal chuck. The chuck can be heated to specified temperatures to achieve variable heating of a wafer, PCB, or pallet disposed thereon. The temperature controller adjusts the temperature of the chuck to a first specified level. The tester performs at least one first measurement of the output offset of each integrated sensor embodied as a die on the wafer, or as a device on the PCB or pallet. Next, the temperature controller adjusts the temperature of the chuck to a second specified level, and the tester performs at least one second measurement of the output offset of each integrated sensor at the second temperature level. The offset temperature coefficient (OTC) of each sensor is calculated based upon the output offset measurements performed at the first and second temperature levels, and optimal settings for calibrating the respective sensors are determined based upon the calculated OTC values. After the temperature of the chuck is brought back down to the first specified level, the tester programs the output offset calibration settings into each sensor.
REFERENCES:
patent: 5902925 (1999-05-01), Crispie et al.
patent: 6795752 (2004-09-01), Zhao et al.
patent: 6867611 (2005-03-01), Stone
patent: 6905333 (2005-06-01), Cox
patent: 6941809 (2005-09-01), Le Roy et al.
Huang Feiming
Liu Haidong
MEMSIC, Inc.
Noland Thomas P
Weingarten Schurgin, Gagnebin & Lebovici LLP
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