Multi-substrate feeder for semiconductor device manufacturing sy

Details Multi-substrate feeder for semiconductor device manufacturing sy Multi-substrate feeder for semiconductor device manufacturing sy

1995-06-22

1998-02-03

Underwood, Donald W.

Material or article handling

Horizontally swinging load support

Swinging about pivot

B25J 1804

Patent

active

057137170

ABSTRACT:
A multi-substrate feeder used in a semiconductor device manufacturing system is disclosed. The multi-substrate feeder precisely feeds a plurality of substrates to desired positions at the same time. The multi-substrate feeder has an arm support plate having a cylindrical rotor in the center thereof. A plurality of substrate feeding arms are movably placed on the arm support plate to feed a plurality of substrates at the same time. Each substrate feeding arm is mounted to the edge of the rotor at one end thereof and used for holding a substrate on the other end thereof. The feeder also has arm guide means for guiding the movement of the substrate feeding arms on the arm support plate to guide the substrate feeding direction of the feeder.

REFERENCES:
patent: 5151008 (1992-09-01), Ishida et al.

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