Multi-stage vacuum pump with reaction chamber between stages

Details Multi-stage vacuum pump with reaction chamber between stages Multi-stage vacuum pump with reaction chamber between stages

1991-02-22

1992-07-21

Bertsch, Richard A.

Rotary expansible chamber devices

Methods

418 9, 418 47, 418206, 417243, F04C 2910

Patent

active

051318253

ABSTRACT:
The invention relates to a method for the operation of a multi-stage, dry compression vacuum pump (1) with an inlet (7) and an outlet (9), in which the aspirated gases contain gaseous components which endanger the operation of the vacuum pump; in order to render the gas components harmless it is proposed that the gases aspirated from the vacuum chamber (8) and flowing through the vacuum pump be carried through a reaction chamber (14) in which the components endangering the vacuum pump are chemically or physically treated at a pressure between the aspiration pressure and the outlet pressure of the vacuum pump.

REFERENCES:
patent: 1769153 (1930-09-01), Meyer
patent: 4066386 (1978-01-01), Johnson et al.
patent: 4087197 (1978-05-01), Haugen
patent: 4789314 (1988-12-01), Higuchi et al.
patent: 4850827 (1989-07-01), Eiermann
patent: 4943215 (1990-07-01), Berges

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