Pumps – Diverse pumps – Including rotary nonexpansible chamber type
Patent
1994-10-21
1995-12-26
Bertsch, Richard A.
Pumps
Diverse pumps
Including rotary nonexpansible chamber type
417205, 417247, 4174234, 417266, 418 9, F04B 2312, F04B 3504
Patent
active
054782104
ABSTRACT:
A vacuum pump includes a plurality of rotors accommodated in a housing, a plurality of bearings for supporting the shafts of the rotors, respectively, a fluid-suction opening and a fluid-discharge opening formed in the housing, and a motor for driving at least one of the rotors. The pump has a first pump structure section for suction and discharge of gas, the pressure of which is in a viscous flow region, by utilizing change in volume of a space formed by the rotors and the housing. A second pump structure section is provided for transporting gas, a pressure of which is in an intermediate flow region, and gas, the pressure of which is lower than a pressure of the intermediate flow region, by utilizing movement of the space from a suction side to a discharge side of the second pump structure section.
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Maruyama Teruo
Takara Akira
Bertsch Richard A.
Matsushita Electric - Industrial Co., Ltd.
McAndrews, Jr. Roland G.
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