Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent
1995-09-13
1998-03-31
Underwood, Donald W.
Material or article handling
Horizontally swinging load support
Swinging about pivot
74 8915, 212296, 212348, 4147445, 901 15, 901 23, G25J 1804
Patent
active
057330964
ABSTRACT:
A multi-stage telescoping tube structure and a robot including a multi-stage telescoping tube structure. The multi-stage telescoping tube structure includes an outer tube, an intermediate tube, and an inner tube. The intermediate tube is slidably received in the outer tube, and the inner tube is slidably received in the intermediate tube. It further includes a multi-stage screw for arrangement translating rotary motion into linear movement of the tubes, and a drive means coupled to the screw arrangement. The robot further includes a support bracket, rotatably supporting the multi-stage telescoping tube structure, and an electric motor for rotating the arrangement. The structure further includes rail guides engagable with complimentary horizontally extending rails for horizontal movement of the robot.
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Van Doren, Matthew J., Precision Machine Design for the Semiconductor Equipment Manufacturing Industry, Massachusetts Institute of Technology, May 1995.
Sauer Don
Slocum Alexander H.
Van Doren Matthew J.
Silicon Valley Group Inc.
Underwood Donald W.
Walker William B.
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