Multi-stage molecular pump

Details Multi-stage molecular pump Multi-stage molecular pump

1988-08-15

1990-01-16

Garrett, Robert E.

Rotary kinetic fluid motors or pumps

Smooth runner surface for working fluid frictional contact

F01D 136

Patent

active

048939854

ABSTRACT:
A molecular pump of the Hollweck type is composed of a plurality of stages in order to improve the pumping characteristics. Rotor and stator consist of different portions which are provided alternately with helical grooves and with smooth outer and inner surfaces respectively. The cooperating surfaces of the individual rotor and stator portions are tapered.

REFERENCES:
patent: 4645413 (1987-02-01), Reich
patent: 4668160 (1987-05-01), Mase et al.
patent: 4684317 (1987-08-01), Luijten et al.
patent: 4732530 (1988-03-01), Ueda et al.
patent: 4746265 (1988-05-01), Luijten
European Patent No. 129,709, Jan. 1985, Kaneto.
Turbomolecular Pump Becker, Oct. 1966.
Molecular Pump, Gaede, pp. 337-380.

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