Multi-spectrum photodiode devices

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357 23, 357 41, 357 55, H01L 2714

Patent

active

042387604

ABSTRACT:
One or more photoelectric device elements are formed beneath the surface of a monolithic semiconductor structure below a surface photoelectric detector device to form a plurality of photoelectric devices having different spectral responses. The surface element is responsive to visible light and the one or more subsurface devices are sensitive to longer wavelength radiation depending upon the depth of the device below the surface of the structure. A two dimensional array of the devices may be formed in a single semiconductor wafer to provide a self-scanning multi-element photosensor array.

REFERENCES:
patent: 3478214 (1969-11-01), Dillman
patent: 3812518 (1974-05-01), Kurz et al.
patent: 3964083 (1976-06-01), Lohstroh
patent: 4011016 (1977-03-01), Layne
patent: 4048649 (1977-09-01), Bohn
patent: 4084175 (1978-04-01), Ouyang
patent: 4109270 (1978-08-01), Basse

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