Multi-spectral uncooled microbolometer detectors

Details Multi-spectral uncooled microbolometer detectors Multi-spectral uncooled microbolometer detectors

2005-03-23

2009-02-17

Hannaher, Constantine (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

Reexamination Certificate

active

07491938

ABSTRACT:
A process and system for a medium wave infrared (MWIR) uncooled microbolometer focal plane array (FPA). One embodiment is for a single MWIR band uncooled IR detector, wherein the design and fabrication utilizes standard silicon processing techniques reducing manufacturing costs and preserving existing manufacturing capabilities. Another embodiment is a two color uncooled microbolometer IR detector providing broadband detection.

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PCT Search Report dated Oct. 24, 2005 of PCT Application No. PCT/US2005/009526 filed Mar. 23, 2005, not a publication.

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