Multi-site probe

Details Multi-site probe Multi-site probe

2007-08-17

2010-12-07

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S765010

Reexamination Certificate

active

07847568

ABSTRACT:
Various probe substrates for probing a semiconductor die and methods of use thereof are disclosed. In one aspect, a method of manufacturing is provided that includes forming a first matrix array of conductor pins and a second matrix array of conductor pins on a probe substrate. The second matrix array of conductor pins is separated from the first matrix array of conductor pins by a first pitch along a first axis selected to substantially match a second pitch between a first semiconductor die and a second semiconductor die of a semiconductor workpiece.

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