Multi-segment parallel wire capacitor

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor

Reexamination Certificate

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Details

C361S306200, C361S306300, C361S311000, C361S321100, C361S321200

Reexamination Certificate

active

07471500

ABSTRACT:
A multi-segment parallel wire capacitor includes substantially identical multiple capacitor segments fabricated on a semiconductor substrate. Each segment comprises at least first and second interleaved metal finger formed in a first metal layer above the substrate and third and fourth interleaved metal fingers formed in a second metal layer. The first and fourth sets are connected together to form one plate of the capacitor and the second and third sets are connected to form a second plate. The multiple capacitor segments are arranged in a matrix having M rows and N columns. The multiple capacitor segments are inter-connected in such a manner that the capacitor segments in each column of the matrix are connected in parallel. First and second metal lines selectively connect the plates of the different capacitor segments in the first and last rows and serve as the two opposite terminals of the multi-segment parallel wire capacitor.

REFERENCES:
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patent: 5208725 (1993-05-01), Akcasu
patent: 5973907 (1999-10-01), Reed
patent: 6496355 (2002-12-01), Galvagni et al.
patent: 6620701 (2003-09-01), Ning
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patent: 7135366 (2006-11-01), Rotella
patent: 7151660 (2006-12-01), Chen et al.
patent: 7154734 (2006-12-01), Schultz et al.
Aparicio, Roberto and Ali Hajimiri. “Capacity Limits and Matching Properties of Integrated Capacitors”,IEEE Journal of Solid-State Circuits, vol. 37, No. 3, Mar. 2002, pp. 384-393.

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