Multi-purpose noninterceptive charged particle beam diagnostic d

Details Multi-purpose noninterceptive charged particle beam diagnostic d Multi-purpose noninterceptive charged particle beam diagnostic d

1996-05-06

1997-08-26

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

With detector

250305, 250310, H01J 37245

Patent

active

056613040

ABSTRACT:
A method and apparatus for detecting diffraction radiation from a charged particle beam in order to measure parameters that characterize the charged particle beam. The charged particle beam passes near one or more edges, apertures, or interfaces between media of different dielectric constants such that the beam is not intercepted. This generates forward diffraction radiation and reflected diffraction radiation at an angle relative to the direction of the beam. The radiation passes through a focusing system and onto a detector which measures a desired parameter.

REFERENCES:
patent: 3917946 (1975-11-01), Van Oostrum
patent: 5045695 (1991-09-01), Rule et al.
patent: 5120968 (1992-06-01), Fiorito et al.
patent: 5336886 (1994-08-01), Itoh

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