Multi-point microprobe for testing integrated circuits

Details Multi-point microprobe for testing integrated circuits Multi-point microprobe for testing integrated circuits

1973-07-19

1977-12-27

Larkins, William D.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324 725, 357 70, G01R 106, G01R 3126

Patent

active

040657175

ABSTRACT:
A multi-point probe for contacting closely spaced pads of a semiconductor device, having a flexible sheet-like member which carries the probes that make contact with the semiconductor device.

REFERENCES:
patent: 3317287 (1967-05-01), Caracciolo
patent: 3440027 (1969-04-01), Hugle

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