Multi-piece lathe chuck for silicon ingots

Details Multi-piece lathe chuck for silicon ingots Multi-piece lathe chuck for silicon ingots

1997-04-17

2000-01-11

Morgan, Eileen P.

Abrading

Work holder

Clamp

451379, 451398, 82 111, B24B 4900

Patent

active

06012976&

ABSTRACT:
Improved chucks for supporting elongate objects having conical end portions, such as single crystal ingots of semiconductor material, while such objects are held and rotated, as in a lathe. A base portion of the chuck includes bores to accept fasteners to fasten the base to a headstock or tailstock of a lathe. The base includes a receptacle for holding an annular chuck insert which has a conical socket surface to engage the body, such as a conical end portion of a single crystal ingot, to be held and rotated. Alternatively, the base may have three or more rollers spaced equally about a central axis and rotatable about roller axes all located in a plane perpendicular to the central axis.

REFERENCES:
patent: 5148652 (1992-09-01), Herzog
patent: 5205080 (1993-04-01), Ibe et al.
patent: 5525092 (1996-06-01), Hirano et al.
patent: 5586476 (1996-12-01), Esser
patent: 5722805 (1998-03-01), Giffin
Richard M. Aydelott, Declaration, Jun. 18, 1999.

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