Multi-module solid state radiation detector with continuous phot

Details Multi-module solid state radiation detector with continuous phot Multi-module solid state radiation detector with continuous phot

1996-06-05

1998-10-06

Glick, Edward J.

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

25037008, 2502081, H01L 27146, H01L 3100, G01T 124

Patent

active

058180532

ABSTRACT:
A solid state radiation detector and fabrication method therefor provide a plurality of modules disposed adjacent one another in a two-dimensional array. Each of the modules includes an array of thin film transistors. A continuous radiation detecting layer, such as a photoconductor layer is disposed over the modules. The radiation detecting layer generates electrical charge representative of a pattern of radiation. The thin film transistors are used to sense the electrical charge on a pixel-by-pixel basis to form a representation of an image. A continuous insulating layer can be disposed between the radiation detecting layer and a continuous conducting layer.

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