Multi-modular device for wet-processing integrated circuits

Details Multi-modular device for wet-processing integrated circuits Multi-modular device for wet-processing integrated circuits

1993-07-21

1995-04-04

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

134902, B08B 304

Patent

active

054028078

ABSTRACT:
This invention relates to an improved automatic processing system and process for handling delicate objects in a controlled, low particulate atmosphere, and an improved method for constructing such apparatus. This system is particularly useful in the wet processing of semiconductor wafers, integrated circuits and similar delicate electronic devices. This invention also relates to semiconductor wafers, integrated circuits and similar delicate electronic devices produced by the above processing system and process.

REFERENCES:
patent: 4345615 (1982-08-01), DiCicco et al.
patent: 4520834 (1985-06-01), DiCicco
patent: 4827954 (1989-05-01), Layton
patent: 5156174 (1992-10-01), Thompson et al.
patent: 5168886 (1992-12-01), Thompson et al.
patent: 5191908 (1993-03-01), Hiroe et al.
patent: 5265632 (1993-11-01), Nishi

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