Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate
2007-01-02
2007-01-02
Berman, Jack (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
With detector
C250S311000
Reexamination Certificate
active
10878659
ABSTRACT:
A charged particle device is provided comprising a charged particle source configured to direct charged particles in the direction of a specimen under examination and an imaging device configured to convert charged particles to an image representing the specimen. The imaging device comprises a detector defining a pixel array. The detector is configured to generate electric charges for individual pixels of the pixel array such that the electric charges collectively define the image. The imaging device is configured such that a portion of the pixel array can be transitioned between a partially masked state and a substantially unmasked state.
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Chao Henry Shih-Ming
Kraus Bernd
Mooney Paul Edward
Trevor Colin Geoffrey
Berman Jack
Dinsmore & Shohl LLP
Ropintassco Holdings, L.P.
Yantorno Jennifer
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