Material or article handling – Device for emptying portable receptacle – Nongravity type
Reexamination Certificate
1999-11-08
2001-07-17
Gordon, Stephen T. (Department: 3612)
Material or article handling
Device for emptying portable receptacle
Nongravity type
C414S222020, C414S939000
Reexamination Certificate
active
06261048
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to a substrate processing apparatus and, more particularly, to an apparatus having substrate processing chambers at different vertical levels on a transport chamber.
2. Prior Art
Mattson Technology has a system known as its ASPEN system that moves two semi-conductor wafers into and out of a process chamber at the same time. Batch systems, single wafer systems and cluster tool systems are also known in the prior art. U.S. Pat. No. 4,951,601 discloses a substrate processing apparatus with multiple processing chambers and a substrate transport apparatus. U.S. Pat. No. 5,180,276 discloses a substrate transport apparatus with two a substrate holders. U.S. Pat. No. 5,270,600 discloses a coaxial drive shaft assembly of a substrate transport apparatus. U.S. Pat. No. 4,094,722 discloses a rotatable palette that holds four wafers. U.S. Pat. No. 4,381,965 discloses a multi-planar electrode plasma etcher. U.S. Pat. No. 4,675,096 discloses a take-in-and-out chamber with side-by-side take-in and take-out positions. Other related art includes the following:
U.S. Pat. No.: 1,190,215 U.S. Pat. No.: 2,282,608
U.S. Pat. No.: 3,730,595 U.S. Pat. No.: 3,768,714
U.S. Pat. No.: 3,823,836 U.S. Pat. No.: 3,874,525
U.S. Pat. No.: 4,062,463 U.S. Pat. No.: 4,109,170
U.S. Pat. No.: 4,208,159 U.S. Pat. No.: 4,666,366
U.S. Pat. No.: 4,721,971 U.S. Pat. No.: 4,730,975
U.S. Pat. No.: 4,907,467 U.S. Pat. No.: 4,909,701
U.S. Pat. No.: 5,151,008 U.S. Pat. No.: 5,333,986
U.S. Pat. No.: 5,447,409
EPO Publication No.: 0423608
Japanese Publication No.: 2-292153
SUMMARY OF THE INVENTION
In accordance with one embodiment of the present invention, a substrate processing apparatus is provided comprising a substrate transport and substrate processing chambers. The substrate transport has a transport chamber and a transport mechanism for transporting substrates into and out of the transport chamber. The substrate processing chambers are stationarily connected to the transport chamber. A first one of the processing chambers is vertically orientated in a plane above a second one of the processing chambers. The transport mechanism can transport substrates into and out of the first and second processing chambers.
In accordance with another embodiment of the present invention, a substrate transport mechanism for transporting substrates into and out of substrate processing chambers is provided comprising a rotatable drive, a first arm, and a first substrate holder. The first arm is pivotably connected to the drive. The arm has a first arm section pivotably connected to a second arm section. The first substrate holder is pivotably connected to the second arm section. At least one of the arm sections pivotably moves in a vertical direction when it is pivoted.
In accordance with another embodiment of the present invention, a substrate transport mechanism for transporting substrates into and out of substrate processing chambers is provided comprising a first arm and a substrate holder. The first arm has two arm sections pivotably connected to each other to move in parallel vertical directions when they are pivoted relative to each other. The substrate holder is movably mounted to one of the arm sections by an articulating wrist. The wrist pivots in at least two directions to maintain the substrate holder in a horizontal position.
In accordance with another embodiment of the present invention, a substrate processing apparatus is provided comprising a substrate transport, substrate processing chambers, and a controller. The substrate transport has a transport chamber and a substrate transport mechanism. The substrate processing chambers are stationarily connected to the transport chamber. The processing chambers are located in at least two vertically different horizontal planes with at least one of the horizontal planes having at least two processing chambers. The controller is for controlling the substrate transport mechanism to insert and remove substrates from the processing chambers at the vertically different horizontal planes.
In accordance with another embodiment of the present invention, a substrate transport mechanism for a substrate processing apparatus is provided comprising a drive, two arms, and two substrate holders. The arms are pivotably connected to the drive to move in vertical directions. Each arm has at least two arm sections. Each one of the substrate holders are connected to a separate one of the arms.
In accordance with one method of the present invention, a method of moving substrates in a substrate processing apparatus is provided comprising steps of providing a substrate transport mechanism with serially connected members that are pivotably connected to each other. One of the members comprising a substrate holder connected at an end of the transport mechanism; and controlling pivotable movement of the members relative to each other to move the substrate holder substantially straight into and out of substrate processing chambers.
In accordance with another method of the present invention, a method of moving substrates in a substrate processing apparatus is provided comprising steps of providing a substrate transport mechanism with an arm connecting a drive to a substrate holder, the arm having two serially connected arm sections pivotably connected to each other at a middle joint and pivotably connected to the drive at an inner joint, the substrate holder being pivotably connected to the arm for movement along at least two axes of rotation at an end joint; and controlling rotational movement of the arm sections, the substrate holder and the drive to move the substrate holder into and out of the substrate processing chambers at different vertical locations and different horizontal locations.
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Prospectus for Mattson Technology, Inc., pp3 and 20-30, 1994.
Brooks Automation Inc.
Gordon Stephen T.
Perman & Green LLP
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