Multi-level substrate processing apparatus

Details Multi-level substrate processing apparatus Multi-level substrate processing apparatus

1996-06-13

2000-05-16

Gordon, Stephen T.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414222, 414939, B65G 104

Patent

active

060627980

ABSTRACT:
A substrate processing apparatus having a substrate transport and substrate processing chambers. The substrate transport has a transport chamber and a transport mechanism. The transport mechanism has a rotatable drive, an arm pivotably connected to the drive to pivot in vertical directions, and a substrate holder pivotably connected to an end of the arm by an articulating wrist. The arm can vertically move the substrate holder up and down. The substrate processing chambers are stationarily connected to the transport chamber at two different vertical levels.

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Prospectus for Mattson Technology, Inc., pp. 3 and 20-30, 1994.

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