Multi-level digital micromirror device

Details Multi-level digital micromirror device Multi-level digital micromirror device

1993-12-21

1996-12-10

Ben, Loha

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359224, 359846, G02B 2600

Patent

active

055836887

ABSTRACT:
An improved hidden hinge digital micromirror device, and method of making the same, having hinges 424 attached to a yoke 428 which limits the rotation of the device mirror 430. In one embodiment, the mirror 430 is supported by a center support post 416 attached to two torsion hinges 424 by a landing hinge yoke 428. The ends of the torsion hinges 424 are attached to two support posts 426 which hold the hinges 424 above the substrate 400 and allow the hinges 424 to twist in a torsional fashion. The device is fabricated using two sacrificial spacer layers 404, 414 which are removed to allow the mirror 430 to rotate.

REFERENCES:
patent: 5083857 (1992-01-01), Hornbeck
patent: 5202785 (1993-04-01), Nelson
patent: 5212582 (1993-05-01), Nelson
patent: 5233456 (1993-08-01), Nelson

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