Etching a substrate: processes – Adhesive or autogenous bonding of two or more...
Patent
1995-07-18
1996-11-26
Powell, William
Etching a substrate: processes
Adhesive or autogenous bonding of two or more...
216 88, 216101, 505410, 505820, B44C 122
Patent
active
055782264
ABSTRACT:
A multi-layer superconductive interconnect structure includes a first multi-layer substrate with a first superconducting layer (SL) deposited on a first epitaxial substrate and a first glue dielectric layer (GDL) on the first SL. A second multi-layer substrate includes a second SL deposited on a second epitaxial substrate and a second GDL on said second SL. The first GDL and the second GDL are clamped and cured together to form a composite substrate.
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Chan Hugo W.
Silver Arnold H.
Powell William
TRW Inc.
Yatsko Michael S.
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