Static information storage and retrieval – Magnetic bubbles – Guide structure
Patent
1990-03-12
1991-09-17
Hille, Rolf
Static information storage and retrieval
Magnetic bubbles
Guide structure
357 235, 365185, H01L 2348
Patent
active
050499750
ABSTRACT:
An interconnection layer of a semiconductor device according to the present invention has in a contact portion with a conductor layer a multi-layered structure formed from the bottom, of a refractory metal silicide layer, a first refractory metal nitride layer, and a second refractory metal nitride layer. Titanium or tungsten is used as a refractory metal. The second refractory metal nitride is formed by thermally nitriding the refractory metal layer. The second refractory metal nitride layer formed by the thermal process has a close packed crystal structure and has an excellent barrier characteristic.
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patent: 4599706 (1986-07-01), Guterman
patent: 4792842 (1988-12-01), Honma et al.
patent: 4870615 (1989-09-01), Maruyama et al.
patent: 4887146 (1989-12-01), Hinode
Ajika Natsuo
Arima Hideaki
Hille Rolf
Loke Steven
Mitsubishi Denki & Kabushiki Kaisha
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