Multi-layered film reflector manufacturing method

Details Multi-layered film reflector manufacturing method Multi-layered film reflector manufacturing method

2005-05-24

2005-05-24

Chang, Audrey (Department: 2872)

Optical: systems and elements

Light interference

Produced by coating or lamina

C359S580000, C430S005000, C378S035000

Reexamination Certificate

active

06898011

ABSTRACT:
Methods are disclosed for manufacturing multi-layer film reflection mirrors, in which a desirable shape accuracy of a reflected wavefront can be obtained after locally scraping the multi-layer film. In an exemplary method, a multi-layer film (comprising respective alternating layers of at least two types of substances having different respective refractive indices) is superposedly formed on the surface of a mirror substrate. The multi-layer film has a constant period length, and the multi-layer film on the substrate is locally scraped to correct a phase of a reflected wavefront from the reflective surface of the mirror. The multi-layer film has an internal stress of 50 MPa or smaller. Alternatively or in addition, a compensating adjustment in a film formed on a reverse surface of the substrate can be made to cancel the stress perturbation caused by scraping of the multi-layer film on the obverse surface of the substrate.

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