Multi-layered field oxide structure

Details Multi-layered field oxide structure Multi-layered field oxide structure

1988-07-05

1991-08-06

Lechert, Jr., Stephen J.

Fishing, trapping, and vermin destroying

156901, 428901, 437241, 437243, 437245, H01L 2100

Patent

active

050377817

ABSTRACT:
A radiation-hardened field oxide comprises a thin layer of high-quality thermal oxide, a thick layer of borophosphosilica glass and a diffusion barrier layer of undoped oxide, with the boron and phosphorous provising recombination sites for electron-hole pairs.

REFERENCES:
patent: 4673531 (1987-06-01), Lee
patent: 4681795 (1987-07-01), Tuckerman
patent: 4682143 (1987-07-01), Chu et al.
patent: 4693925 (1987-09-01), Cheung et al.

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