Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1991-01-04
1992-12-22
Niebling, John
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
2041802, 2041809, 2041816, G01N 2726
Patent
active
051731622
ABSTRACT:
A multi-layered electrostrictive effect element comprises films or thin plates of an electrostrictive material and inner electrodes alternatively arranged in layers, the inner electrodes being formed on the entire surface of the films or thin plates of the electrostrictive material, wherein the insulating layer which insulates the inner electrodes exposed on the side end faces of the element comprises a polyimide resin having repeating units represented by the following general formula (I): ##STR1## (wherein X represents a tetravalent group selected from the group consisting of tetravalent phenyl groups; tetravalent biphenyl groups; and tetravalent polyphenyl groups in which at least one of either the phenyl or bipheny groups are bonded through at least one member selected from the group consisting of O, CO, S, CH.sub.2, C(CH.sub.3).sub.2 and C(CF.sub.3).sub.2 and Y represents a bivalent groups selected from the group consisting of bivalent phenyl groups; bivalent biphenyl groups; bivalent polyphenyl groups in which at least one of either the phenyl or biphenyl groups are bonded through at least one member selected from the group consisting of O, CO, S, SO.sub.2, CH.sub.2, C(CH.sub.3).sub.2 and C(CF.sub.3).sub.2 ; alkylene groups; and xylylene groups) and an insulating filler. A process for making a multi-layered electrorestrictive effect element having a high dielectric strength is also disclosed.
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Hagimura Atsushi
Inage Ikuo
Nakajima Mutsuo
Nishihara Kunio
Mitsui Toatsu Chemicals Inc.
Niebling John
Ryser David G.
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