Multi-layer superhard film structure

Details Multi-layer superhard film structure Multi-layer superhard film structure

1991-12-18

1994-05-10

Turner, A. A.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

51307, 51309, 428336, 428408, C30B 2104, C23C 2804

Patent

active

053105966

ABSTRACT:
A multi-layer diamond film is grown by d.c. arc assisted plasma deposition. A series of layers are deposited on each other by periodically back-etching the surface and renucleating during deposition. There may also be deposited a thin layer of non-diamond carbon material between the diamond layers, but no other non-carbon material. Renucleation is controlled by varying the proportion of methane to hydrogen in the feed gases, by temperature cycling of the substrate, or by inducing modal changes in the arc.

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English translation of JP63-277593 (Nov. 1988).
Badzian et al "Crystallization of Diamond Crystals and Films by Microwave Assited CVD Chart II)" Mat. Res. Bull. vol. 23 pp. 531-548 (1988).

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