Multi-layer superhard film structure

Details Multi-layer superhard film structure Multi-layer superhard film structure

1993-09-02

1996-05-21

Dudash, Diana

Coating processes

Coating by vapor, gas, or smoke

Plural coatings applied by vapor, gas, or smoke

427249, 427577, 427580, C23C 1626, B05D 138, H05H 148

Patent

active

055187668

ABSTRACT:
A multi-layer diamond film is grown by d.c. arc assisted plasma deposition. A series of layers are deposited on each other by periodically back-etching the surface and renucleating during deposition. There may also be deposited a thin layer of non-diamond carbon material between the diamond layers, but no other non-carbon material. Renucleation is controlled by varying the proportion of methane to hydrogen in the feed gases, by temperature cycling of the substrate, or by inducing modal changes in the arc.

REFERENCES:
patent: 3661526 (1972-05-01), Angus et al.
patent: 4301134 (1981-11-01), Strong
patent: 4707384 (1987-11-01), Schachner et al.
patent: 4734339 (1988-03-01), Schachner et al.
patent: 4836881 (1989-06-01), Satoh et al.
patent: 4842937 (1989-06-01), Meyer et al.
patent: 4919974 (1990-04-01), McCune et al.
patent: 4925701 (1990-05-01), Janson et al.
patent: 4929489 (1990-05-01), Dreschhoff et al.
patent: 4958592 (1990-09-01), Anthony et al.
patent: 4988421 (1991-01-01), Drawl et al.
patent: 5006203 (1991-04-01), Purdes
patent: 5017317 (1991-05-01), Marcus
patent: 5023109 (1991-06-01), Chin et al.
patent: 5082359 (1992-01-01), Kirkpatrick
patent: 5114696 (1992-05-01), Purdes
patent: 5131941 (1992-07-01), Lemelson
patent: 5169579 (1992-12-01), Marcus et al.
patent: 5242711 (1993-09-01), DeNatale et al.
patent: 5368937 (1994-11-01), Itoh

Affiliated with

Also associated with

Rating

Multi-layer superhard film structure does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi-layer superhard film structure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi-layer superhard film structure will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2036224