Multi-layer resist

Details Multi-layer resist Multi-layer resist

1990-02-20

1991-12-10

Sluby, P. C.

Stock material or miscellaneous articles

Structurally defined web or sheet

Including components having same physical characteristic in...

4284111, 428432, 428442, 4284735, 428469, 428329, 428463, 4274301, 4274343, B32B 2700, B32B 2734, B05D 120

Patent

active

050716948

ABSTRACT:
A multi-layer resist comprising (A) a layer of a Langmuir-Blodgett film, (B) a layer of at least one thin film and (C) a substrate, said layer (B) being placed between said layer, (A) and said substrate (C). The multi-layer resists of the invention are applicable to ultra fine processing on the order of submicron, half-micron or quarter-micron, and the number of defects can be remarkably decreased.

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