Multi-layer reflection mirror for soft X-ray to vacuum ultraviol

Details Multi-layer reflection mirror for soft X-ray to vacuum ultraviol Multi-layer reflection mirror for soft X-ray to vacuum ultraviol

1994-10-17

1995-07-18

Turner, Archene

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Structurally defined web or sheet

Continuous and nonuniform or irregular surface on layer or...

428433, 428446, 428472, 428698, 428408, 428704, 428913, 359359, 359360, 359361, G02B 528

Patent

active

054339880

ABSTRACT:
A multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray, comprises a substrate, a plurality of first layers, and a plurality of second layers formed on the substrate alternately with the first layers. The first layers primarily consists of at least one of single elements, such as ruthenium, or of a boride carbide, silicate, nitride oxide of a transition metal. The second layers primarily consists of at least one of compounds of carbon, silicon (e.g. carbide, nitride and oxide of silicon), boron (e.g. carbide, nitride and oxide of boron), beryllium (e.g. carbide, nitride and oxide of beryllium) and aluminum (e.g. carbide, nitride and oxide of aluminum).

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Baumeister et al "Use of hafnium dioxide in multilayered dielectric reflectors for near uv" Appl. Opt. vol. 16, No. 2 Feb 77 pp. 439-444.

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