Valves and valve actuation – Electrically actuated valve – Having element dimensionally responsive to field
Patent
1994-12-16
1997-07-15
Nguyen, Hoang
Valves and valve actuation
Electrically actuated valve
Having element dimensionally responsive to field
25112901, F16K 3102
Patent
active
056475748
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
Prior Art
The invention starts from a microvalve of layers arranged one above the other and connected to one another and relates furthermore to a valve arrangement having at least two microvalves connected in parallel.
Microvalves of this type are usually composed of semiconductor layers which are bonded to form the permanent connection. The individual semiconductor layers are brought into the shape and structure necessary for the function by complex etching methods. A microvalve of this type is described, for example, in WO 90/15933. Such microvalves are relatively expensive due to the expensive layer material or the complex manufacturing processes. Owing to the very complex production technique, the valves have to be produced in very large numbers in order to achieve a sufficient cost-effectiveness. Adaptations or differentiations of these microvalves during manufacture can only be carried out at considerable expense.
SUMMARY OF THE INVENTION
The microvalve according to the invention is characterized in that the closure member, the membrane and the pressure-compensating surface are formed in an integral plastic component which is a middle layer of the microvalve.
The microvalve according to the invention therefore is distinguished by a simple construction and can thus be manufactured cost-effectively. The construction is selected such that the valve can be composed with a very small number of individual elements so that the connection methods are reduced to a minimum and the errors and complexities associated with these connection methods are thus likewise reduced.
In the manufacture of the valve, the middle part, in particular, is manufactured by a plastic moulding process--in particular injection moulding or embossing--and thus by a moulding or structuring process which has a high degree of precision and reproducibility with low expense. Modifications and adaptations are possible with relatively little expense due to modular construction of one or more valves.
In this manufacturing method, differentiated requirements in respect of the material or different material components, compositions or types of layering can additionally be fulfilled.
The valve arrangement according to the embodiment in which the two electrodes of the electra static device are designed at least as part of the outer surface of a pyramid, has the advantage that adaptations of the flow volume can easily be undertaken due to the modular construction and the parallel connection of a plurality of microvalves. The valve arrangement can be adapted in a simple manner to different volume requirements. By means of different fitting in the type and number of the microvalve units, a diversity of variants can additionally be achieved with little diversity of components in a simple and cost-effective manner in terms of production.
Further advantages and advantageous further developments result from the description and the subclaims.
BRIEF DESCRIPTION OF THE DRAWINGS
The invention is explained in greater detail with reference to the following description and drawing. The latter shows,
in FIG. 1, a section through a microvalve according to the invention in a simplified illustration,
in FIG. 2, a section through a second exemplary embodiment of the microvalve,
in FIG. 3, a detail of this second exemplary embodiment,
in FIGS. 4 and 5, a third and fourth exemplary embodiment,
in FIG. 6, in the left half of the picture a first modification and in the right half of the picture a second modification of the microvalve according to FIG. 5,
in FIG. 6a, a plan view of the opened first modification,
in FIG. 7, in the left half and right half of the picture in each case different modifications of the microvalve according to FIG. 1,
in FIGS. 8 and 9, in their left and right halves of the picture in each case further modifications of the micro-valve according to FIG. 1,
in FIG. 10, a cutaway, perspective illustration of a microvalve arrangement with microvalves connected in parallel.
DESCRIPTION OF THE PREFERRED EMBODIME
REFERENCES:
patent: 4643223 (1987-02-01), Abe et al.
patent: 5029805 (1991-07-01), Albarda et al.
patent: 5161774 (1992-11-01), Engelsdorf et al.
patent: 5238223 (1993-08-01), Mettner et al.
patent: 5340081 (1994-08-01), Wright
patent: 5581624 (1996-12-01), O'Connor
Doering Christian
Mettner Michael
Schittny Thomas
Schuelke Armin
Nguyen Hoang
Robert & Bosch GmbH
Striker Michael J.
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