Semiconductor device manufacturing: process – Having superconductive component
Patent
1999-03-09
2000-08-01
Chaudhuri, Olik
Semiconductor device manufacturing: process
Having superconductive component
438648, 438650, 438608, 438686, 505220, H01L 2100
Patent
active
060965657
ABSTRACT:
A multilayer ceramic substrate electronic component is provided having high temperature superconductor material circuitry. The high temperature superconductor material is preferably yttrium-barium-copper-oxide and is encased within a noble metal such as silver or gold when forming the surface circuitry or filling of the vias. The noble metal layers preferably have through-openings to enable direct connection of circuitry to the encased superconductor layer. A method is also provided for fabricating such multilayer ceramic substrate electronic components.
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Van Nostrand Reinhold, "Microelectronics Packaging Handbook", 1989, pp. 476-493.
Goland David B.
Shelleman Richard A.
Shinde Subhash L.
Studzinski Lisa M.
Vallabhaneni Rao V.
Ahsan Aziz M.
Chaudhuri Olik
International Business Machines - Corporation
Tomaszewski John J.
Wille Douglas A.
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