Multi-layer carbon-based coatings for field emission

Details Multi-layer carbon-based coatings for field emission Multi-layer carbon-based coatings for field emission

1996-10-17

1998-10-13

O'Shea, Sandra L.

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

313309, H01J 1924

Patent

active

058216804

ABSTRACT:
A multi-layer resistive carbon film field emitter device for cold cathode field emission applications. The multi-layered film of the present invention consists of at least two layers of a conductive carbon material, preferably amorphous-tetrahedrally coordinated carbon, where the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure can be a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film can be a plurality of carbon layers, where adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced.

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