Multi-layer capacitor and method for manufacturing the same

Details Multi-layer capacitor and method for manufacturing the same Multi-layer capacitor and method for manufacturing the same

2005-05-17

2005-05-17

Dinkins, Anthony (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S306300

Reexamination Certificate

active

06894887

ABSTRACT:
A multi-layer capacitor is highly downsized and increased in capacity. A method for manufacturing the multi-layer capacitor includes, in the same vacuum chamber, forming a dielectric layer, a surface of the dielectric layer, forming a pattern in a metal electrode, forming the metal electrode on the dielectric layer, and treating a surface of the metal electrode. In this method, etching of the dielectric layer flattens a recessed part generated by an electrical insulation part.

REFERENCES:
patent: 5125138 (1992-06-01), Shaw et al.
patent: 6212057 (2001-04-01), Kohara et al.
patent: 11-147279 (1999-06-01), None

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