Multi-layer address lines for amorphous silicon liquid crystal d

Details Multi-layer address lines for amorphous silicon liquid crystal d Multi-layer address lines for amorphous silicon liquid crystal d

1989-11-29

1992-10-06

Hille, Rolf

Optical: systems and elements

Holographic system or element

Using a hologram as an optical element

359 87, 357 2, 357 237, 357 67, G02F 113

Patent

active

051537540

ABSTRACT:
Each scan line of a liquid crystal display (LCD) includes: a first layer of titanium disposed on the LCD substrate surface to promote adhesion of the scan line to the substratae surface; a layer of molybdenum or aluminum disposed on the first titanium layer to provide a low resistance address line; and a second layer of titanium disposed on the molybdenum layer to promote adhesion of a subsequently deposited layer of passivation material, semiconductor material or the like over the scan line. The multi-layered scan line side walls may be etched to promote step coverage of subsequently deposited layers of material. The data lines may also have a multi-layer conductor structure similar to the scan lines.

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