Multi-layer acoustic surface wave device having minimal delay ti

Details Multi-layer acoustic surface wave device having minimal delay ti Multi-layer acoustic surface wave device having minimal delay ti

1983-09-28

1985-05-07

Beha, Jr., William H.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310313B, 333155, H03H 942

Patent

active

045160490

ABSTRACT:
An acoustic surface wave device includes a substrate made of an elastic material, a multilayer structure disposed on a surface of the substrate and having a silicon dioxide layer and an aluminum nitride layer superimposed on each other, and electrodes having predetermined configurations formed on the multilayer structure. The main component of the elastic material is a silicon monocrystal, whose temperature coefficient of delay time for acoustic surface waves is positive, and the piezo-electric axis of the aluminum nitride is either perpendicular or parallel to the surface of the substrate, with a negative delay coefficient, counteracting that of the substrate.

REFERENCES:
patent: 3956647 (1976-05-01), Mitchell et al.
patent: 3965444 (1976-06-01), Willingham et al.
patent: 4037176 (1977-07-01), Ono et al.
patent: 4038615 (1977-07-01), Ishiyama et al.
patent: 4194171 (1980-03-01), Jelks
patent: 4358745 (1982-11-01), Keyes
patent: 4393321 (1983-07-01), Bagdasarian et al.

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