Multi-function differential pressure sensor with thin stationary

Details Multi-function differential pressure sensor with thin stationary Multi-function differential pressure sensor with thin stationary

1992-04-17

1995-12-26

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

Diaphragm

73708, 73721, G01L 1302

Patent

active

054777380

ABSTRACT:
A multi-function differential pressure sensor includes a semiconductor chip, a stationary base having a joining portion joined to a thick wall portion of the semiconductor chip, and a housing joined to the stationary base. The semiconductor chip is provided with a differential pressure detection unit, a static pressure detection unit, and a temperature detection unit. The joining portion of the stationary base is not thicker than the semiconductor chip. The stationary base has one or more thin wall portions located, in a plan view, within a circular pressure sensitive diaphragm of the semiconductor chip.

REFERENCES:
patent: 4771639 (1988-09-01), Saigusa et al.
patent: 4798093 (1989-01-01), Kenoun
patent: 4800759 (1989-01-01), Hirata et al.
patent: 4813272 (1989-03-01), Miyazaki et al.
patent: 4972716 (1990-11-01), Tobita et al.
patent: 5012677 (1991-05-01), Shimada et al.
patent: 5029479 (1991-07-01), Bryan
patent: 5062302 (1991-11-01), Petersen et al.

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