Multi-frequency ultrasonic wire bonder and method

Details Multi-frequency ultrasonic wire bonder and method Multi-frequency ultrasonic wire bonder and method

1996-09-20

1999-03-23

Heinrich, Samuel M.

Metal fusion bonding

Process

With condition responsive, program, or timing control

2281101, H01L 21607

Patent

active

058848347

ABSTRACT:
The present invention includes a multi-frequency ultrasonic generator coupled to a multi-resonance frequency transducer capable of operating at a plurality of usable resonance frequencies. A controller is coupled to a power amplifier that drives the ultrasonic transducer and is capable of applying power, voltage or current profiles for each of the resonance frequencies to be used during a bonding operation independent of the others.

REFERENCES:
patent: 4586642 (1986-05-01), Dreibelbis et al.
patent: 5578888 (1996-11-01), Safabakhsh

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