Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2005-04-19
2005-04-19
Font, Frank G. (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S505100, C378S034000
Reexamination Certificate
active
06881965
ABSTRACT:
The invention provides a miniaturized multi-foil object for use in a laboratory environment and other practical applications that require small or portable and/or disposable high energy radiation optics. Specifically, the invention finds utility in high energy lithographic systems, such as X-ray or EUV lithography, as a condenser optic or in topographic systems. In lithographic systems, the present invention exhibits square symmetry, a relatively large aperture size, and disposability. Additionally, the multi-foil optic of the invention provides a high throughput efficiency.
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Bowen David Keith
Hudec Rene
Inneman Adolf
Menzer Stephan
Pina Ladislav
Bede Scientific Instruments Ltd.
Burns Doane Swecker & Mathis L.L.P.
Font Frank G.
Hughes James P.
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