Measuring and testing – Surface and cutting edge testing – Roughness
Reexamination Certificate
2011-03-08
2011-03-08
Larkin, Daniel S (Department: 2856)
Measuring and testing
Surface and cutting edge testing
Roughness
C850S021000, C850S033000, C850S040000, C850S052000, C850S056000, C850S063000
Reexamination Certificate
active
07900506
ABSTRACT:
The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures. The monolithic crystal actuator further includes a plurality of metallic electrodes disposed on inside or outside surfaces, or a combination thereof, of the plurality of thin flexure structures.
REFERENCES:
patent: 6246054 (2001-06-01), Toda et al.
patent: 7278297 (2007-10-01), Bauza et al.
Shane C. Woody, Stuart T. Smith; “Resonance-based vector touch sensors”; Center for Precision Metrology; University of North Carolina at Charlotte; Corresponding author: Insitu Tec. Inc., Charlotte, NC; see front matter (C) 2003 Elsevier Inc.; Available online at www.sciencedirect.com. All rights reserved.
Bauza Marcin B.
Smith Stuart T.
Woody Shane C.
Baratta Jr. Lawrence A.
Bernard Christopher L.
Clements Bernard PLLC
Insitutec, Inc.
Larkin Daniel S
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