Multi-dimensional precision micro-actuator

Details Multi-dimensional precision micro-actuator Multi-dimensional precision micro-actuator

1993-01-06

1994-12-20

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

361289, 361296, 310309, H01G 514

Patent

active

053750330

ABSTRACT:
Mechanically movable microstructure fabricated from a single crystal such as silicon and actuator structures for providing a high degree of controlled, precision motion of nanometer-scale variable impedances.

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