Multi-detector ellipsometer and process of multi-detector ellips

Details Multi-detector ellipsometer and process of multi-detector ellips Multi-detector ellipsometer and process of multi-detector ellips

1996-08-05

1998-05-26

Trammell, James P.

Boots, shoes, and leggings

356366, 356367, 356368, 356369, 250225, G01N 2162, G01B 9027

Patent

active

057576718

ABSTRACT:
An ellipsometer comprising several photodetectors and an electronic processing unit (4) produces a beam of light modulated at a modulation frequency (Fm) which is reflected by a sample. The photodetectors measure fluxes from parts of the reflected luminous beam, producing measured analog signals in input channels (6), and the electronic processing unit (4) calculates physical parameters of the sample. This electronic processing unit (4) comprises a multiplexing and digitizing unit (7) successively switching to the input channels (6) at a switching frequency (Fe) and a sequencer (19). The sequencer (19) comprises means (24, 35) to allow setting the switching frequency (Fe) as a multiple of the modulation frequency (Fm). The ellipsometer takes optical measurements in real time, in particular for depositing films on substrates.

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"Phase-Modulated Ellipsometer Using a Fourier Transform Infrared Spectrometer of Real Time Applications", by Canillas et al., Review of Scientific Instruments, vol. 64, No. 8, Aug. 1993, pp. 2153-2159.
"An IR Phase-Modulated Ellipsometer Using a Fourier Transform Spectrometer for In Situ Applications", by Canillas et al., Thin Solid Films, vol. 234, No. Jan. 2, Oct. 1993, pp. 318-322.

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