Horizontally supported planar surfaces – Power driven
Patent
1997-02-06
1998-08-18
Cuomo, Peter M.
Horizontally supported planar surfaces
Power driven
248371, 7449007, 108 6, A47F 512
Patent
active
057945411
ABSTRACT:
A multi-degree-of-freedom table support unit U comprising a lengthwise and crosswise motion mechanism with two outer support plates integrally combined with an inner support plate sandwiched therebetween, and with bearings B installed between the inner support plate and outer support plates. A spherical bearing mechanism consisting of a spherical face 5 formed on a surface of the inner support plate having a spherical body 6 slidably engaged with the spherical face. A rod 8 is installed in an opening 7 formed in at least one of the outer support plates, with its tip connected with the spherical body; and a straight motion bearing mechanism for back-and-forth movement of the rod is provided. There is also provided a multi-degree-of-freedom table mechanism, in which support units with the above structure are used to support a stage 14 on a support frame 13, so that the stage 14 can be moved in X, Y and Z directions by driving the rods of the support units back and forth.
REFERENCES:
patent: 2877830 (1959-03-01), Smith
patent: 4602555 (1986-07-01), Bushey
patent: 5031547 (1991-07-01), Hirose
patent: 5163651 (1992-11-01), Matsumoto
patent: 5307676 (1994-05-01), Gutman
Cuomo Peter M.
Hihaisuto Seiko Co., Ltd.
Wilkens Janet M.
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