Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2007-05-29
2007-05-29
King, Hoy (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S228800, C204S275100, C205S157000, C205S191000, C134S026000, C134S148000, C134S151000, C134S153000
Reexamination Certificate
active
10616284
ABSTRACT:
Embodiments of the invention generally provide an electrochemical plating system. The plating system includes a substrate loading station positioned in communication with a mainframe processing platform, at least one substrate plating cell positioned on the mainframe, at least one substrate bevel cleaning cell positioned on the mainframe, and a stacked substrate annealing station positioned in communication with at least one of the mainframe and the loading station, each chamber in the stacked substrate annealing station having a heating plate, a cooling plate, and a substrate transfer robot therein.
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Britcher Eric B.
D'Ambra Allen L.
Donoso Bernardo
Ellwanger Russell C.
Ho Henry
King Hoy
Patterson & Sheridan LLP
Zheng Lois
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