Multi-chamber vacuum processing and transfer system

Details Multi-chamber vacuum processing and transfer system Multi-chamber vacuum processing and transfer system

2011-01-25

2011-01-25

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S222130, C414S939000

Reexamination Certificate

active

07874783

ABSTRACT:
An apparatus for processing a work piece in a vacuum environment includes a master process chamber that can be exhausted to a sub-atmospheric air pressure or to be filled with a desirable gas, a transfer chamber configured to receive the work piece from outside of the master process chamber, one or more processing stations inside the master process chamber, a rotation plate configured to receive the work piece and to move the work piece to receive one or more processing operations, and a first transport mechanism configured to transfer the work piece from the transfer chamber on to the rotation plate. The transfer chamber is at least partially enclosed in the master process chamber and can be vacuum sealed off from the master process chamber.

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