Multi-chamber vacuum installation

Details Multi-chamber vacuum installation Multi-chamber vacuum installation

1990-10-18

1991-10-08

Rosenberg, Peter D.

Metallurgical apparatus

Means for melting or vaporizing metal or treating liquefied...

By providing, treating or protecting environment, e.g., vacuum

75508, C21C 710

Patent

active

050547488

ABSTRACT:
A multi-chamber vacuum installation includes a charge-changing chamber (5) and a plurality of processing chambers (1, 2, 3, 4) located within the charge-changing chamber. One of the processing chambers (4) also serves as an air lock chamber. The air lock chamber (4) is formed of two parts, and inner part (4a) and an outer part (4b). The inner part is secured to the inside and the outer part is secured to the outside of the charge-changing chamber.

REFERENCES:
patent: 1554368 (1925-09-01), Rackoff
patent: 3501289 (1970-03-01), Finkl
patent: 3999984 (1976-12-01), Kawai
patent: 4294611 (1981-10-01), Tamas

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